Tokyo Electron Ltd - Company Profile

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Tokyo Electron Ltd: Patents

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View up-to-date information on Tokyo Electron Ltd patents, including inventor and filing insights.

Publication Identifier	Document Type	Title	Classification-CPC	Publication Date
CN115066742A	Application	基片处理方法和基片处理系统	H01L21/027; H01L21/3065	September 16, 2022
CN115066314A	Application	加工方法以及加工装置	B24B49/02; B24B7/00; H01L21/304	September 16, 2022
CN115066735A	Application	使用低频偏置脉冲的等离子体加工方法	H01J2237/3341; H01J37/32082; H01J37/321; H01J37/32128; H01J37/32146; H01J37/32165; H01J37/32697; H01J37/32715; H01L21/3065; H01L21/31116; H01L21/32136; H01L21/67069; H01L21/6833	September 16, 2022
WO2022190924A1	Application	SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD		September 15, 2022
WO2022192362A1	Application	3D DEVICE WITH A PLURALITY OF CORE WIRING LAYOUT ARCHITECTURE	H01L21/8221; H01L21/823487; H01L27/0688; H01L29/1037; H01L29/66666; H01L29/7827	September 15, 2022

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