Mr. Yoshikazu Nunokawa has been the Chairman and Executive Vice President & General Manager, of the company since June 2019. Previously, he worked as the Audit and Supervisory board member of the company since 2017. Earlier, he served the company on varied leading positions including Senior Vice President & General Manager, Tokyo Electron Miyagi Ltd, Senior Vice President & General Manager, Tokyo Electron AT Ltd., Vice President & General Manager, Tokyo Electron Ltd., Vice President & General Manager, Tokyo Electron Tohoku Ltd. He joined the company in April 1982.

Mr. Toshiki Kawai has been the Chief Executive Officer, Director, President of the company since June 2022. Prior to this, he served as the Senior Executive Vice President and Chief Operating Officer of the company since 2015. Previously, he worked as the Vice President and General Manager of Surface Preparation Business Unit of the company since 2012. Earlier he served as Vice President & General Manager, Thermal Processing Systems Business Unit, Tokyo Electron Ltd. and Vice President & General Manager, Single Wafer Deposition Business Unit, Tokyo Electron Ltd. In April 1986 he joined the company.

Mr. Michio Sasaki has been the Director of the company since 2021. He is the Director and Vice President of Shift Inc since 2018. Previously, he worked as the Director and Special Advisor of Keyence Corporation since 2010.

Mr. Makiko Eda has been the Director of the company since 2019. He is the Chief Representative Officer of World Economic Forum Japan. Previously, he worked as the President and Director of Intel KK since 2013.

Mr. Sachiko Ichikawa has been the Director of the company since 2021. Prior to this, he served as the outside Corporate Auditor of Ryohin Keikaku Co Ltd since 2018. Previously, he worked as the outside Director of Anritsu Corporation since 2015.