Lam Research Corp - Company Profile

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Lam Research Corp: Patents

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View up-to-date information on Lam Research Corp patents, including inventor and filing insights.

Publication Identifier	Document Type	Title	Classification-CPC	Publication Date
CN115066738A	Application	边缘等离子体密度倾斜控制的可调谐性	H01J37/32467; H01J37/32477; H01J37/32651	September 16, 2022
WO2022192016A1	Application	CONTROL OF MASK CD		September 15, 2022
WO2022192012A1	Application	POLYMERIC COATING FOR SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS		September 15, 2022
EP3843129B1	Grant	UNTERE RANDRINGE	H01J2237/049; H01J2237/334; H01J37/32642; H01L21/67069; H01L21/67115; H01L21/6835; H01L21/68721; H01L21/68735; H01L21/68742	September 14, 2022
CN115053016A	Application	用于含硅膜高温沉积的前体	C23C16/401; C23C16/45527; C23C16/45536; C23C16/45553; H01L21/02164; H01L21/02219; H01L21/02274; H01L21/0228	September 13, 2022

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