Mr. Abhijit Y. Talwalkar has been the Chairman of the company since 2019. Prior to this, he served as the President and Chief Executive Officer of LSI Corp from 2005 to 2014. He also served as a member of the board of directors of the US Semiconductor Industry Association from May 2005 to May 2014. Previously, he held several senior management positions at Intel Corp, including Corporate Vice President and Co-General Manager of the Digital Enterprise Group, Vice President and General Manager of the Intel Enterprise Platform Group from 1993 to 2005. Mr. Talwalkar also held senior engineering and marketing positions at Sequent Computer Systems; Bipolar Integrated Technology, Inc.; and Lattice Semiconductor Inc. Earlier, he worked with iRhythm Technologies Inc, Advanced Micro Devices Inc. and TE Connectivity Ltd.

Mr. Timothy M. Archer has been the Chief Executive Officer, President and Director of the company since December 2018. He also serves on the International Board of Directors for SEMI. Prior to this, he served as the President and Chief Operating officer of the company from January 2018 to November 2018. Earlier, he served as an Executive Vice President and Chief Operating officer of the company. Mr. Archer held various technology development roles at Novellus Systems Inc for 18 years including Chief Operating Officer from January 2011 to June 2012; Executive Vice President of Worldwide Sales, Marketing, and Customer Satisfaction from September 2009 to January 2011; and Executive Vice President of the PECVD and Electrofill business units from November 2008 to September 2009. He also worked as the Senior Director of Technology at Novellus Systems Japan from 1999 to 2001, and Senior Director of Technology of the Electrofill business unit from April 2001 to April 2002 at Novellus. He started his career with Tektronix Inc in 1989. He served as the Chairman of the National GEM Consortium from 2020 to 2022.

Mr. Doug R. Bettinger has been the Chief Financial Officer and Executive Vice President of the company since 2013. He also serves on the Board of Directors of Lattice Semiconductor Corp. Prior to this, he served as the Chief Financial Officer and Senior Vice President of Avago Technologies from 2008 to 2013; Vice President of Finance and Corporate Controller of Xilinx Inc from 2007 to 2008. Previously, Mr. Bettinger served as the Chief Financial Officer of 24/7 Customer from 2004 to 2007. He also held several senior-level finance positions including Corporate Planning and Reporting Controller and Malaysia site operations controller at Intel Corporation from 1993 to 2004.

Mr. Patrick J. Lord has been the Executive Vice President and Chief Operating Officer of the company since March 2023. Prior to this, he served as the Executive Vice President of Customer Support Business Group (CSBG) and Global Operations from 2020 to 2023, and Senior Vice President and General Manager of CSBG from 2016 to 2020 at the company. Previously, Mr. Lord worked as the Group Vice President and Deputy General Manager of the Global Products Group from 2013 to 2016. He also served as the Head of the Direct Metals, GapFill, Surface Integrity Group, and Integrated Metals (DGSI) business units from 2012 and 2013 at the company. Earlier, he served as the Senior Vice President and General Manager of the DGSI business units, Senior Vice President of Business Development and Strategic Planning at Novellus. He also held several other positions, including Senior Vice President and General Manager of the CMP Business Unit, Senior Director of Business Development, Senior Director of Strategic Marketing, and Acting Vice President of Corporate Marketing at Novellus. Before joining Novellus, he worked six years at KLA-Tencor in various product marketing and management roles.

Mr. Vahid Vahedi has been the Senior Vice President and Chief Technology Officer of the company since March 2023. Prior to this, he served as the Senior Vice President and General Manager of Lam's etch business. Previously, he served as the Group Vice President of the etch product group of the company. Mr. Vahedi also served as the Vice President of Etch Business Product Management and Marketing, Vice President of Dielectric Etch, Vice President of Conductor and 3DIC Etch, and Director of Conductor Etch Technology Development at the company.