KLA Corp - Company Profile
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View up-to-date information on KLA Corp patents, including inventor and filing insights.
Patent Trends
Publication Identifier | Document Type | Title | Classification-CPC | Publication Date |
---|---|---|---|---|
CN115066606A | Application | 在电子电路的制备中用于检验图案化物件的多个特征的系统及方法 | G01N2021/8845; G01N2021/9563; G01N21/956 | September 16, 2022 |
CN115060650A | Application | 用于以由空间选择性波长滤波器所修改的照明源将样本成像的系统及方法 | G01N2021/8845; G01N21/8806; G01N21/9501; G03F7/7065 | September 16, 2022 |
CN115066604A | Application | 在样本上的阵列区域中检测缺陷 | G01N21/9501; G01N23/2251; G06T2207/10061; G06T2207/30148; G06T7/0008; G06T7/001 | September 16, 2022 |
CN115060730A | Application | 用于粒子检测的系统和方法 | G01N15/0211; G01N2021/473; G01N2021/8461; G01N2021/8822; G01N2021/8848; G01N21/21; G01N21/47; G01N21/8806; G01N21/94; G01N21/9501; G01N21/95607 | September 16, 2022 |
CN115066646A | Application | 宽带照明调谐 | G02B17/0615; G02B21/0032; G02B21/0048; G02B21/0064; G02B21/0068; G02B26/007; G02B26/101 | September 16, 2022 |
Top Inventors by Filings (Count by publication)
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