Onto Innovation Inc: Patents

View up-to-date information on Onto Innovation Inc patents, including inventor and filing insights.

Patent Trends

Publication Identifier	Document Type	Title	Classification-CPC	Publication Date
WO2022187276A1	Application	POST-OVERLAY COMPENSATION ON LARGE-FIELD PACKAGING		September 09, 2022
US20220228973A1	Application	NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND METHODS	G01N21/1702	July 21, 2022
US11385167B2	Grant	Beamsplitter based ellipsometer focusing system	G01J3/02; G01N2021/213; G01N21/211; G02B7/28	July 12, 2022
WO2022119660A1	Application	VORTEX POLARIMETER	G01B11/02; G01J2003/2826; G01J2004/005; G01J3/2823; G01J4/04; G01N21/21; G01N2201/0633; G03F7/70625	June 09, 2022
WO2022119683A1	Application	FOCUS SYSTEM FOR OPTICAL METROLOGY DEVICE	G01B11/25; G01J4/04; G01N21/211; G01N21/8422; G01N21/9501; G01N2201/068; G02B27/28	June 09, 2022

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